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Minienvironments
Recommended Practice by Institute of Environmental Sciences and Technology, 05/01/2002

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Description

This RP provides a framework for describing minienvironments for microelectronics and similar applications. It is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.

Product Details

Published:
05/01/2002
ISBN(s):
9781877862830
Number of Pages:
28
File Size:
1 file , 930 KB